Harrick Benchtop Plasma Cleaners
Compact, affordable, and versatile plasma instruments for nanoscale surface cleaning, activation, and modification. Ideal for research and lab environments.
What Can You Do With Harrick Plasma Cleaners?
Nanoscale Surface Cleaning
Remove organic contaminants without affecting the bulk properties of the material.
Surface Activation
Modify surface chemistry to increase wettability and promote adhesion (e.g., PDMS to glass bonding).
Sterilization
Effectively sterilize medical and dental instruments at low temperatures.
Polymer Modification
Tailor the surface properties of polymers and biomaterials.
What Can You Do With Harrick Plasma Cleaners?
Nanoscale Surface Cleaning
Remove organic contaminants without affecting the bulk properties of the material.
Surface Activation
Modify surface chemistry to increase wettability and promote adhesion (e.g., PDMS to glass bonding).
Sterilization
Effectively sterilize medical and dental instruments at low temperatures.
Polymer Modification
Tailor the surface properties of polymers and biomaterials.
Choose Your Plasma Cleaner
Most Compact
Basic Plasma Cleaner (PDC-32G)
Compact entry-level unit for small samples
- Chamber: 3" × 6.5" Pyrex
- Max RF Power: 18W
- Dimensions: 8.5" × 10" × 8"
- Weight: 13 lbs / 6 kg
Most Popular
Expanded Plasma Cleaner (PDC-001)
Versatile workhorse for wafers and multi-slide processing
- Chamber: 6" × 6.5" Pyrex
- Max RF Power: 30W
- Dimensions: 11" × 18" × 9"
- Weight: 37 lbs / 17 kg
Maximum Performance
High Power Expanded (PDC-001-HP)
2× faster cleaning rate for demanding applications and thin film etching
- Chamber: 6" × 6.5" Pyrex
- Max RF Power: 45W
- Dimensions: 11" × 18" × 9"
- Weight: 37 lbs / 17 kg
Detailed Specifications Comparison
| Most Compact Basic PDC-32G | Most Popular Expanded PDC-001 | Max Performance High Power PDC-001-HP | |
|---|---|---|---|
| Chamber & Power | |||
| Chamber (Ø × L) | 3″ × 6.5″ | 6″ × 6.5″ | 6″ × 6.5″ |
| Chamber Material | Pyrex | Pyrex | Pyrex |
| RF Power — Low | 7.2 W | 10 W | 18 W |
| RF Power — Medium | 10.4 W | 18 W | 30 W |
| RF Power — High (Max) | 18 W | 30 W | 45 W |
| RF Frequency | 8 – 12 MHz | 8 – 12 MHz | 8 – 12 MHz |
| Physical Specifications | |||
| Dimensions (H × W × D) | 8.5″ × 10″ × 8″ | 11″ × 18″ × 9″ | 11″ × 18″ × 9″ |
| Weight | 13 lbs (6 kg) | 37 lbs (17 kg) | 37 lbs (17 kg) |
| Standard Features | |||
| Hinged Door with Viewing Window | ✓ | ✓ | ✓ |
| Active Fan Cooling | ✓ | ✓ | ✓ |
| Integral Vacuum Pump Switch | ✓ | ✓ | ✓ |
| Metering Valve (Gas Flow Control) | ✓ | ✓ | ✓ |
| 3-Way Valve (Gas / Vent / Isolate) | ✓ | ✓ | ✓ |
| Available Voltages | |||
| 115 V | PDC-32G | PDC-001 | PDC-001-HP |
| 230 V | PDC-32G-2 | PDC-002 | PDC-002-HP |
| 230 V CE Certified | PDC-32G-2 (CE) | PDC-002-CE | PDC-002-HPCE |
| Ideal Use Cases | |||
| Best For | Small samples, single slides, budget-conscious labs | Wafer processing, multi-slide batches, general-purpose R&D | Tough contaminants, thin film etching (10–100 nm), high throughput |
| Requirements | |||
| Vacuum Pump (min.) | 1.4 m³/hr, ≤ 200 mTorr | 1.4 m³/hr, ≤ 200 mTorr | 1.4 m³/hr, ≤ 200 mTorr |
| Request Quote | Request Quote | Request Quote | |
Standard Features Across All Models
- Control Panel: Adjustable RF power settings (Low, Medium, High). Integrated 3-way valve for quick switching between gas introduction, chamber isolation, and venting. Metering valve for fine-tuning gas flow and chamber pressure.
- Gas Compatibility: Compatible with room air, Oxygen (O₂), Argon (Ar), Nitrogen (N₂), and other non-corrosive process gases. Optional PlasmaFlo gas mixer enables quantitative control of up to two process gases simultaneously with vacuum pressure monitoring.
- Vacuum Requirements: All models require a vacuum pump with minimum speed 1.4 m³/hr (23 L/min) and ultimate pressure ≤200 mTorr (0.27 mbar). Standard pumps for non-reactive gases (Air, N₂, Ar) and oxygen-service pumps for concentrated O₂ are available.
- Optional Accessories: PlasmaFlo gas flow mixer for quantitative gas control. Quartz chamber and sample trays available. Compatible vacuum pumps from Harrick.
