UV-KUB 2 - UV-LED masking system
An UV-LED masker with an unrivalled collimation perfomance
The exposure and masking system UV-KUB 2, available in 4″ or 6″ version, is the first UV-LED masking system available on the international market. The UV-KUB 2 is a compact exposure-masking system equipped with a LED based optical head, collimated and homogeneous.
Its masking function enables to reach resolutions down to 2µm. This system is compatible with any of the most popular photoresists such as AZ series, Shipley series, SU-8 and K-CL series.
A new approach of masking
The mask aligner range UV-KUB proposes equipment with different levels of flexibility and functionality, in 4” or 6” version, with or without alignment function.
With the UV-LED masker UV-KUB 2, you benefit from the LED technology:
A cold UV source, therefore eliminating undesirable thermal effects and offer a perfectly monochromatic illumination.
You can operate in continuous or pulse mode.
Lifetime of the LEDs > 10 000h: no particular maintenance needed.
By its hermetic configuration, the exposure-masking UV-KUB 2 is an ideal equipment for your laboratory or clean-room. Compact and controlled by touchscreen, the UV-KUB 2 ensures safety through an entirely closed exposure chamber, with both hard or soft contact modes available.
UV-KUB 2 is especially well suited for:
the creation of microfluidic systems
integrated optical circuits
surface microstructuration by photolithography.
UV-LED soft lithography system
Unrivalled collimation performance
Kloe company has paid particular attention to the unique and specific optical processing chain based on its broad experience in this field.
HIGH quality collimation system
The UV-LED masker UV-KUB 2 benefits from a high quality collimation system that enables to obtain a homogeneous high resolution over the 4 or 6 inches working surface, depending the version.
The divergence angle of the UV light source is less than 2°.
Therefore the achievement of patterns with resolution down to 2µm and with excellent verticality of edges on thick layers is guaranteed.
join the success
Don’t just take our word for it
Reactivity, availability and flexibility seem to be Kloe's key words. The details of the technical characteristics of the product are always perfectly mastered within the commercial team, which from this point of view has proven to be extremely effective so far.
Given the quality and diversity of the proposed microfabrication systems, but also given the close relationship that we have been able to build with the technical and commercial teams, we will undoubtedly remain with Kloe for our future purchase.”
Performances
- Resolution: 2µm
- Wavelength: 365nm +/- 5nm
- Power density: 35mW/cm² +/- 10%
- Substrate warm-up during exposure: < 1°C
- Exposure cycle: between 1s and 1h
- Number of programmable cycles: 10
Specifications
- Dimensions: 260 x 260 x 260mm
- Weight: 8,2kg / 18lbs
- Colour touchscreen: 5,7 inches
- Power supply: 100V/240V – 50Hz/60Hz
- Consumption: 180W
